Innovative Technologies
AW Control Software
The AW Control Software provides a unique upgrade for RTP, Stripper, Etching and other systems which have won a high reputation among our customers.
The AW software Integrates all of the Process Control into a single
reliable software package. It allows the user to control the entire
machine from one single interface. The user can create recipes, run
processes with the recipes, view and analyze process parameters, calibrate
the entire system, and run diagnostics routines.
Superior Temperature Control Technology
The software incorporates a Superior Temperature Control Technology that surpasses all original manufactures specs. The AW software is capable of controlling the temperature of the wafer to ¡À 1¡ãC. It is also able to control the temperature from wafer-to-wafer to ¡À 0.5¡ãC. This is possible with the built-in automated calibration routines and the upgraded 16 bit D/A card. First, the A/D circuits for the temperature feedback devices are calibrated. Then the pyrometer (optional on some systems) is calibrated. In order for the software to understand the thermal capacitance of the system, the chamber is also calibrated. These calibration routines allow the software to understand the complete system, taking into consideration the subtleties of the A/D circuits and the thermal capacitance of heating and cooling of the process chamber.
Superior 3-axis Equipe ATM Wafer Handling Robot
Wafer handling problems with Indexer System?We have replaced the GaSonics Aura 1000 ,Gasonics AE 2001 wafer handling system with the superior 3-axis Equipe ATM Wafer Handling Robot. This gives the Aura 1000,AE 2001 a much superior wafer transport system with proven reliability, higher throughput, increased MTBF and lower overall cost. Along with fewer headaches, better peace-of-mind, and longer coffee breaks.
Robot Control PCB for Matrix
We have developed a robot control board for the Matrix machines,to help in the diagnostics of robot problems. There are LEDs that indicate if the board has received commands and the type of command. It also has LEDs that indicate if a robot limit sensor is active, along with ¡°good¡± voltage level indicators.
