Refurbished Matrix 205
Manufacture:Matrix Integrated Systems
Matrix is a Registered Trademark of Matrix Integrated Systems, Inc.Matrix 205 provides high throughput in a single wafer system capable of handling wide variety of substrates, including round, square and ranging from 3¡± up to 6¡±. By maintaining independent closed-loop system controls, the system optimizes vital device parameters. Matrix205 is housed in a compact, through-the-wall frame.
Single Wafer, Multi-Step Processing
Closed-Loop Temperature Control
Pressure Control
Accurate, closed-loop pressure control with ¡°butterfly-style¡± throttle
valve and capacitance manometer
RF power: 100 to 500 watts
Timed cycles up to 4 hour each
3¡± up to 6¡± wafer
Matrix205 consists of the following major assemblies:
Main Console:
Process Model,
Operator interface Model,
Wafer Transport Module,
Elevator Module,
PC Control Module.
Power Supply Console:
RF Generator,
DC Supply,
AC Distribution,
Gas Distribution panel,
Temperature/Pressure Control Module.
