Refurbished Gasonics L3510
Manufacture:Gasonics
Gasonics is a Registered Trademark of Novellus Corp.The Gasonics L3510 is a versatile downstream photoresist removal system,designed for clean, damage-free removal of the most difficult resist structures.Utilizing the production-proven L-Series platform, the L3510 has a wide process window due to its patented microwave plasma source.Programmable heating and process controls contribute to the systems¡¯ unparalleled process flexibility.3¡±, 4¡±, 5¡±, 6¡± and 8¡±wafer capability.
Main
Equipment
