Refurbished Gasonics Aura 3010
Manufacturer:Gasonics
Aura 3010.The Aura 3010(Aura3000) is a single-wafer downstream photoresist asher, delivers high ash rates with low damage, a large process window, and a choice of process temperatures during the ashing process. The system has a user friendly menu-driven user interface, and is suitable for automation via SMIF (Standard Mechanical Interface) or AGV (Automated Guided Vehicle).3ˇ±, 4ˇ±, 5ˇ±, 6ˇ± and 8ˇ±wafer capability .
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No RF damage (ˇę0.1 volt CV shift)
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High throughput
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Front and backside etching
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Excellent etch rates and uniformities
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150mm ¨C 200mm wafer capability
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3 gas MFC
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Variable platen temperature
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Alumina (ceramic) plasma tube
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Well-characterized process
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Multiple step process capability
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High capital productivity.
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Chamber wall heated and temperature controlled to make better repeatability.
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