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PCM Testing Module Design

AW PCM System is designed for semiconductor fab or lab to automatically do:

  • PCM (process control module) testing. (PCM TEST SELECT)
  • 100% IC die on wafer probing. (IC TEST SELECT)
  • Inline instrument testing. (INLINE TEST SELECT)

For PCM testing, there are DC, RF, LCR, C-V (n-d calculated) testing. AW PCM can control auto prober like EG 4085,EG 2001, EG 1034 etc, and characteristic parameter tester like HP4142 (DC), HP4145A (DC), HP4145B (DC), HP4141 (DC), HP4062 (DC with switch matrix, LCR meter), HP4275A (LCR and C-V), HP4280A (C-V), HP4084A (LCR and C-V), HP8772C (RF, Microwave), HP4085M switch matrix, Keithley S280, S350 etc.
For IC 100% die on wafer probing, AW PCM can control auto prober like EG 4085,EG2001, EG1034 etc, and characteristic parameter tester like HP4142, HP 4145B, HP4141, H4062, S350 and H4085 switch matrix.
For inline instrument testing like metrology tools: m-gage or Sonagage, alpha-step, Rudolph elepisometer, Nanospec AFT, wafer thickness meter etc.
It can save auto alignment info for each mask .
The testing data will be automatically real time sent to the server. Some data can be transferred to text file or excel file.

For PCM MAP TEST, there are 3 setups for auto map probing:

  • Test ID (Manual Test) Setup
  • Map ID setup
  • and Auto ID

We can also provide the following e- test used equipment.

·Temptronic TP03500
·Rucker and Kolls Model 260J Probing Station
·Refurbished ELECTROGLAS HORIZON 4085X
·SIGNATONE S-250 Probe
·Refurbished EG 1034
·Refurbished EG 2001
·Refurbished MP 2020
·Refurbished HP 4145B
·Refurbished HP 4062
·Refurbished HP 4155

·AW PCM/IC Software

Rapid Thermal Process

AccuThermo AW 410

AccuThermo AW 610

AccuThermo AW 810

AG Heatpulse 210

AG Heatpulse 410

AG Heatpulse 610

Used Plasma Asher

Matrix 105

Matrix 10

Gasonics Aura 1000

Gasonics Aura 3010

Gasonics Aura 2000LL

Branson IPC 3000

Branson IPC L3200

Used Plasma Etcher

Matrix 303

Gasonics AE 2001

AutoEtch Lam 490

Lam Rainbow 4520 Oxide Etch

Lam 4428 for Plasma Etch

Used Electrical Test

PCM Software

HP 4062UX

HP 4145B

EG 1034

EG 2001

EG HORIZON 4085X

Temptronic TP03500

Used Metrology Instruments

Hitachi S8840

Hitachi FE-SEM model S-4160

Hitachi S-4500

Hitachi S-4700

Hitachi S-8820

Hitachi S-9300

Micrion FIB model M9500

LEO FE-SEM model 982

Other Semiconductor Equipment

 

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Contact us by sales@plasmaequipments.com now for more information.

 

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