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Products
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Refurbished Matrix 303
Manufacturer:Matrix Integrated Systems
Refurbished by:Allwin21 Corp
Matrix is a Registered Trademark of Matrix Integrated Systems, Inc.The
model 303 is an electro-mechanical production system used to etch materials
such as nitride, oxide poly-silicon etc. from the surface of silicon or other
substrate. Each wafer is processed individually by means a chemical reaction
induced by a gas plasma.
Single Wafer, Multi-Step Processing
Closed-Loop Temperature Control
Pressure Control
Accurate, closed-loop pressure control with “butterfly-style” throttle valve
and capacitance manometer
RF power: 100 to 500 watts
Timed cycles up to 4 hour each
Matrix 303 consists of the following major assemblies.
Main Console:
Process Model,
Operator interface Model,
Wafer Transport Module,
Elevator Module,
PC Control Module.
Power Supply Console:
RF Generator,
DC Supply,
AC Distribution,
Gas Distribution panel,
Temperature/Pressure Control Module.
Vacuum Pump (optional):
Vacuum Hose and Connector, Ballast Assembly.
We provide advanced Equip Robot transfer wafer technology , AW Control
Software and Superior Temperature Control Technology to upgrade the
refurbished Matrix303 which provides the following significant advantages.
- New hardware includes:
New control Board with cable, new timer counter with watch dog, Pentium
Computer with 17” LCD Monitor, standard keyboard and mouse.
- Software calibration
and easy to be done.
- More functions and I/O
hardware “exposed” for easier maintenance and trouble shooting.
- It is easy to edit
recipe with GUI and graph display.
- Save all process data
on the computer hard disk.
- A/D and D/A precision
is 14 to 16 bits.
- Detect in process and
with color curve displayed on the screen.
- Robot teach is on the
GUI and easy to do the procedure with new concept teaching method.
- Software watch dog to
eliminate machine damage duo to the computer locks up or freeze.
- Sensor status detect
function.
- On line help function
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