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Products
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Refurbished Matrix 105
Manufacturer:Matrix Integrated Systems
Refurbished by:Allwin21 Corp
Matrix is a Registered Trademark of Matrix Integrated Systems, Inc.Matrix
105 provides high throughput in a single wafer system capable of handling wide
variety of substrates, including round, square and ranging from 3” up to 6”.
By maintaining independent closed-loop system controls, the system optimizes
vital device parameters.
Single Wafer, Multi-Step Processing
Closed-Loop Temperature Control
Pressure Control
Accurate, closed-loop pressure control with “butterfly-style” throttle valve
and capacitance manometer
RF power: 100 to 500 watts
Timed cycles up to 4 hour each
Matrix105 Applications
High dose implant (As+, B+, P+)
Post-polysilicon etch
Post-metal etch
Post-oxide etch
Rework
Controlled Resist Removal
- Post-develop descum
(pre-etch)
Dry/wet process capability
Resist planarization
Uniformity capability (5% 1s)
GaAs wafer Stripping and Descum
Thin Film Head Resist Cleaning and Surface Treatment
MEMS (Micro Electro- Mechanical Systems) Up to 4 hour processes
Matrix 105 consists of the following major assemblies:
- Main Console:
Process Model,
Operator interface Model,
Wafer Transport Module,
Elevator Module,
PC Control Module.
- Power Supply Console:
RF Generator,
DC Supply,
AC Distribution,
Gas Distribution panel,
Temperature/Pressure Control Module.
- Vacuum Pump
(optional): Vacuum Hose and Connector, Ballast Assembly.
We can also provide advanced Equip Robot transfer wafer technology , AW
Control Software and Superior Temperature Control Technology to upgrade the
refurbished Matrix 105 which provides the following significant advantages.
- New hardware includes:
New control Board with cable, new timer counter with watch dog, Pentium
Computer with 17” LCD Monitor, standard keyboard and mouse.
- Software calibration
and easy to be done.
- More functions and I/O
hardware “exposed” for easier maintenance and trouble shooting.
- It is easy to edit
recipe with GUI and graph display.
- Save all process data
on the computer hard disk.
- A/D and D/A precision
is 14 to 16 bits.
- Detect in process and
with color curve displayed on the screen.
- Robot teach is on the
GUI and easy to do the procedure with new concept teaching method.
- Software watch dog to
eliminate machine damage duo to the computer locks up or freeze.
- Sensor status detect
function.
- On line help function
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