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Refurbished Matrix 10 Manufacturer:Matrix Integrated Systems Refurbished by:Allwin21 Corp Matrix is a Registered Trademark of Matrix Integrated Systems, Inc.Matrix 10 provides high throughput in a single wafer system capable of handling wide variety of substrates, including round, square and ranging from 4” up to 8”. By maintaining independent closed-loop system controls, the system optimizes vital device parameters.Fully Refurbished Matrix 10 plasma asher system is for 4 to 8 inch wafer with 3 gas lines with MFCs and one chamber with 8 inch chuck.
Matrix 10 onsists of the following major assemblies: (1) Main Console: Process Model, Wafer Transport Module, Elevator Module with New Control Board. We have developed a robot control board for the Matrix machines to help in the diagnostics of robot problems. There are LEDs that indicate if the board has received commands and the type of command. It also has LEDs that indicate if a robot limit sensor is active, along with “good” voltage level indicators. (2) Power Supply Console: 1000W RF Generator, DC Supply, AC Distribution Gas Distribution panel, Temperature/Pressure Control Module. We can also provide advanced Equip Robot transfer wafer technology , AW Control Software and Superior Temperature Control Technology to upgrade the refurbished Matrix 10 which provides the following significant advantages.
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Contact us by sales@plasmaequipments.com now for more information.
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PlasmaEquipments is DBA of Allwin21 Corp.