Plasma Etcher/Dry Etcher--Lam Rainbow 4520 Oxide Etch

Products	Used Lam Rainbow 4520 Manufacturer: LAM Research Model: Rainbow 4520 Serial: 3923 - 4"/100mm - Envision software - Through-the-wall - Orbital Gas Box - RF cart with PDW 2200 AE RF generator - Dual Verity EP200Mmd Endpoint detection. - Remote operator interface, circuit breaker style onboard AC dist. - Dual channel LAM chiller included : LAM 2080 TCU - 208V 3 phase 30A power. Software version :need system power boot up . Pedestal type : clamp type. Gas MFC configuration : N2 100 SCCM UFC-1200A He 1 SLM UFC-1660 CHF3 50 SCCM UFC-1200A CF4 100 SCCM UFC-1200A Ar 1 SLM UFC-1200A O2 20 SCCM UFC-1200A 10 gas lines and 6 gas used. RF Gen type : PDW2200 Advanced Energy. Vacuum pump: Load lock =====Ebara pump Main chamber ==Edward Pump IQDP 80 Blower QMB 250 Chiller type : Lam Research 2080 TCU
Rapid Thermal Process
AccuThermo AW 410
AccuThermo AW 610
AccuThermo AW 810
AG Heatpulse 210
AG Heatpulse 410
AG Heatpulse 610
Used Plasma Asher
Matrix 105
Matrix 10
Gasonics Aura 1000
Gasonics Aura 3010
Gasonics Aura 2000LL
Branson IPC 3000
Branson IPC L3200
Used Plasma Etcher
Matrix 303
Gasonics AE 2001
AutoEtch Lam 490
Lam Rainbow 4520 Oxide Etch
Lam 4428 for Plasma Etch
Used Electrical Test
PCM Software
HP 4062UX
HP 4145B
EG 1034
EG 2001
EG HORIZON 4085X
Temptronic TP03500
Used Metrology Instruments
Hitachi S8840
Hitachi FE-SEM model S-4160
Hitachi S-4500
Hitachi S-4700
Hitachi S-8820
Hitachi S-9300
Micrion FIB model M9500
LEO FE-SEM model 982
Other Semiconductor Equipment

PlasmaEquipments is DBA of Allwin21 Corp.