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Products
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Used Hitachi
S8840 Scanning Electron Microscope
Hitachi
S8840 SEM Consisting of:
- Manufacturer: Hitachi
- Model: S8840
- Wafer Size: 200mm
- Hitachi S8840 CD SEM Mainframe
- CD measuring size: 130-160nm, consistently
- Version 11.7 S/W or newer
- SECS/GEM Communication Interface
- Additional hard disk drive (>1GB)
- VRT board w/ 8 mb of memory
- DSP compatible conductive wafer holder
- Hitachi Hi Tech Electron Gun
- Accelerating voltage, 500V to 1300V, 10V steps
- Probe current, 1-16pA at 800V, 1-10pA at 1000V, 1-13pA at 1300V
- 3 Stage Electromagnetic Lens System
- Objective Lens: 4 opening click stop, heated aperture is
selectable/adjustable outside the vacuum system
- 2-Stage Deflection Scan Coil
- Astigmatism correction via an 8-pole electromagnetic coil
- Magnification = 1000x to >150000x
- Field control method ; Continuously on for sample decharging, at all
voltages
- Wafer imaging ability; Entire surface of 8"" wafer
- Depth of focus: >= 1.0mm at 80000x magnification
- Resolution: < 8nm at 700V - 1000V (or < 6nm with optional retarding
voltage), < 6nm at 1000V - 1300V
-Retarding voltage: Optional at <= 800V for improved resolution
- Hitachi Probe Tip
-Optical Microscope System: Image is Monochrome, using CCD camera,
Magnification is 110x, Wafer imaging X & Y coverage from 5–195mm , notch
down
- Dual XY Hitachi Microscale
- Workstation, HP B180L
- Error Tracking Software
- Multipoint Measurement Function
- Edge Roughness Function
- Contact Hole Measurement Function
- Automated Image Archiving Function
- Ergonomic Cassette Flipper Option (2 flippers - one per load port)
- Operations Manual and Documentation
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We provide high quality, used, 2nd hand, rebuilt and refurbished CD-SEM.
FESEM, SEM, and FIB.(SEM Image Digitizer System.Schottky Field Emission
Filaments for CD-SEM equipment).
SEM:
- Zeiss/Leo DSM982 FE SEM
- Hitachi S-4500 - FE SEM, Type I and
Type II
- Hitachi S-4700 - FE SEM, Type II
- Hitachi S-4800 - FE SEM, Type II
- Zeiss/Leo 435VP - W
SEM, variable pressure JSM-6401F
- JSM-6330F
- JSM6300
- JSM6400
- SEIKOI SMI 8100
- SEIKOI SMI 8300
- Hitachi S-806C
CD/SEM:
FIB:
- FEI/Micrion M9100
Workstation, Gas box optional
- FEI/Micrion M9500 Workstation,
Gas box optional
- Seiko 8300 FIB
- Seiko 8100 FIB
Our equipment is fully reconditioned to meet or exceed OEM
specifications and carried out by the qualified engineers with many years of
experience working for OEM.
We provide:
-Complete turn key solutions including installation worldwide.
-Modifying and re-engineering equipment to meet specific customer
applications.
-Operation, maintenance, and applications training.
-Warranty service for our equipment.
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