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Products
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Used Hitachi
S-9300 CD SEM_SDI
Manufacturer: Hitachi
Specifications:
Model No: S-9300
Wafer Size: 200mm,300mm
Electron Optical System: Electron Gun: Schottky emission source
Accelerating Voltage: 500V to 1600V, 10V steps, Probe current: 4~24pA
Electromagnetic Lens: 3-Stage Electromagnetic Lens System with boosting
voltage
Objective Lens: 4-opening click stop, heated aperture is
selectable/adjustable outside the vacuum
Scan Coil: 2-Stage Electromagnetic Deflection
Magnification = 1000X to > 300,000X
Wafer Imaging Ability: Entire Surface of 12” wafer
Resolution: 3nm (800V)
Y coverage from 5 – 295nm, notch down
Field of view: 1.2mm
Workstation: Model HP B180L (9GB)
O/S: Unix version HP-UX 10.20 or newer
SECS/GEM communication interface
Dual XY Hitachi Microscale
DSP Image Processing
BSE Mode Functionality
Multipoint Measurement Function
Edge Roughness Function
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We provide high quality, used, 2nd hand, rebuilt and refurbished CD-SEM.
FESEM, SEM, and FIB.(SEM Image Digitizer System.Schottky Field Emission
Filaments for CD-SEM equipment).
SEM:
- Zeiss/Leo DSM982 FE SEM
- Hitachi S-4500 - FE SEM, Type I and
Type II
- Hitachi S-4700 - FE SEM, Type II
- Hitachi S-4800 - FE SEM, Type II
- Zeiss/Leo 435VP - W
SEM, variable pressure JSM-6401F
- JSM-6330F
- JSM6300
- JSM6400
- SEIKOI SMI 8100
- SEIKOI SMI 8300
- Hitachi S-806C
CD/SEM:
FIB:
- FEI/Micrion M9100
Workstation, Gas box optional
- FEI/Micrion M9500 Workstation,
Gas box optional
- Seiko 8300 FIB
- Seiko 8100 FIB
Our equipment is fully reconditioned to meet or exceed OEM
specifications and carried out by the qualified engineers with many years of
experience working for OEM.
We provide:
-Complete turn key solutions including installation worldwide.
-Modifying and re-engineering equipment to meet specific customer
applications.
-Operation, maintenance, and applications training.
-Warranty service for our equipment.
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