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· Model: S-8820 or S-8620 · Vintage: 1996 · Wafer Size: 150 mm · Throughput: 20 wafers per hour 5 pt meas. per wafer continuous · SECS/GEM Communication Interface · Schottky Electron Gun · Single se detector · Accelerating voltage, 500V to 1300V, 10V steps · Probe current, 1-16pA at 800V, 1-10pA at 1000V, 1-13pA at 1300V · 3 Stage Electromagnetic Lens System · Objective Lens: 4 opening click stop, selectable/adjustable externally · 2-Stage Deflection Scan Coil · Astigmatism correction via an 8-pole electromagnetic coil · SEM Magnification = 1,000x to 150,000x · Wafer imaging ability: Entire surface of 8” wafer · Depth of focus: >= 1.0mm at 80,000x magnification · Resolution: 5 nm at 800V on CRT · Optical Microscope: Monochrome CCD camera, Fixed Mag of 110x · Workstation, HP 715-64 computer or later model · · Edge Roughness Function · Contact Hole Measurement Function · Automated Image Archiving Function · Foreline pump (Rotary) x2 · Turbo pump X2 · Ion Pump x3 · Operating Voltage 100 V AC, 50 Amp.
We provide high quality, used, 2nd hand, rebuilt and refurbished CD-SEM. FESEM, SEM, and FIB.(SEM Image Digitizer System.Schottky Field Emission Filaments for CD-SEM equipment). SEM:
CD/SEM:
FIB:
Our equipment is fully reconditioned to meet or exceed OEM specifications and carried out by the qualified engineers with many years of experience working for OEM.
-Complete turn key solutions including installation worldwide. |
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Contact us by sales@plasmaequipments.com now for more information.
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PlasmaEquipments is DBA of Allwin21 Corp.