Plasma Etcher/Dry Etcher--Gasonics AE 2001

Products	Refurbished Gasonics AE 2001 Manufacturer:Gasonics Refurbished by:Allwin21 Corp Gasonics is a Registered Trademark of Novellus Corp.AE 2001 is a single wafer downstream isotropic etch system, designed to etch thin films such as poly silicon, silicon nitride and CVD oxides.Utilizing the proven Aura downstream microwave source and a dedicated reactor chamber, GaSonicsAE2001 offers high etch rates and no RF damage to the wafer. Featuring high reliability and flexibility in process parameter, GaSonics AE 2001 is the unparalleled tool of choice for multiple applications and high capital productivity. Gaonicsa AE2001 is an electro-mechanical production system used to etch materials such as nitride, oxide poly-silicon etc. from the surface of silicon or other substrate. Each wafer is processed individually by means a chemical reaction induced by a gas plasma. Single Wafer, Multi-Step Processing Closed-Loop Temperature Control Pressure Control Accurate, closed-loop pressure control with butterfly-style throttle valve and capacitance manometer RF power: 100 to 500 watts Timed cycles up to 4 hour each No RF damage (Ł0.1 volt CV shift) High throughput Front and backside etching Excellent etch rates and uniformities 100mm 150mm wafer capability Variable platen temperature Alumina (ceramic) plasma tube Fluorine compatible chamber Well-characterized process Multiple step process capability High capital productivity. We provide advanced Equip Robot transfer wafer technology , AW Control Software and Superior Temperature Control Technology to upgrade the refurbished Gasonics AE 2001 which provides the following significant advantages. New hardware includes: New control Board with cable, new timer counter with watch dog, Pentium Computer with 17 LCD Monitor, standard keyboard and mouse. Software calibration and easy to be done. More functions and I/O hardware exposed for easier maintenance and trouble shooting. It is easy to edit recipe with GUI and graph display. Save all process data on the computer hard disk. A/D and D/A precision is 14 to 16 bits. Detect in process and with color curve displayed on the screen. Robot teach is on the GUI and easy to do the procedure with new concept teaching method. Software watch dog to eliminate machine damage duo to the computer locks up or freeze. Sensor status detect function. On line help function
Rapid Thermal Process
AccuThermo AW 410
AccuThermo AW 610
AccuThermo AW 810
AG Heatpulse 210
AG Heatpulse 410
AG Heatpulse 610
Used Plasma Asher
Matrix 105
Matrix 10
Gasonics Aura 1000
Gasonics Aura 3010
Gasonics Aura 2000LL
Branson IPC 3000
Branson IPC L3200
Used Plasma Etcher
Matrix 303
Gasonics AE 2001
AutoEtch Lam 490
Lam Rainbow 4520 Oxide Etch
Lam 4428 for Plasma Etch
Used Electrical Test
PCM Software
HP 4062UX
HP 4145B
EG 1034
EG 2001
EG HORIZON 4085X
Temptronic TP03500
Used Metrology Instruments
Hitachi S8840
Hitachi FE-SEM model S-4160
Hitachi S-4500
Hitachi S-4700
Hitachi S-8820
Hitachi S-9300
Micrion FIB model M9500
LEO FE-SEM model 982
Other Semiconductor Equipment

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PlasmaEquipments is DBA of Allwin21 Corp.