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Refurbished Branson IPC L3200
Manufacturer:Branson
Refurbished by:Allwin21 Corp
Reactor
Center
* Dual quartz chambers for 100-150mm wafers, cassette to casette operation
* Automatic pneumatic soft-lift assemblies for each chamber
* In-line gas filters (0.05 micron)
* Two PM 732 automatch networks
* Quartz halogen lamp for preheating
* Process capabilities: positive and negative resist, hardened resist,
polyimide
Process control and instrumentation
We provide advanced AW Control Software and Superior Temperature Control
Technology to upgrade the refurbished Branson IPC L3200 which provides the
following significant advantages.
- New hardware includes:
New control Board with cable, new timer counter with watch dog, Pentium
Computer with 17” LCD Monitor, standard keyboard and mouse.
- Software calibration
and easy to be done.
- More functions and I/O
hardware “exposed” for easier maintenance and trouble shooting.
- It is easy to edit
recipe with GUI and graph display.
- Save all process data
on the computer hard disk.
- A/D and D/A precision
is 14 to 16 bits.
- Detect in process and
with color curve displayed on the screen.
- Robot teach is on the
GUI and easy to do the procedure with new concept teaching method.
- Software watch dog to
eliminate machine damage duo to the computer locks up or freeze.
- Sensor status detect
function.
- On line help function
Gas Handling Module and Control Features
* Two process gas lines and one purge line to include: One O2 @ 4000 SCCM
mass flow controller, Optional gas (blank), fast and slow N2 purge
* All Stainless steel valves and gas lines
* Automatic variable throttle valve for pressure control
* Separate capacitance manometers for each chamber with isolation valve
Wafer Handling and Sensing
* Automatic pick-and-place wafer handling
* Two elevator cassette stands for send-to-receive operation
DC Power Module
* Distributes AC/DC power to system
System Power Control Panel
* AC ON/OFF for system power, RF generator, and vacuum pumps
Power Cabinet Assembly
* 510 Power Distribution Module
* Wafer Heating Module
* Separate control for system power, RF generator, and vacuum pumps control
signal
* Shielded high-voltage components
* Emergency OFF switches
* Cover safety interlocks
* 12-VAC control to complete system
* ENI Mod.-12A RF Generator, 13.56MHz, crystal controlled, 0-1000 watts,
continuously rated, Solid state, water-cooled
Safety and Security Features
* All covers interlocked
* Emergency OFF switches
* Electronic and software interlocks for RF power, wafer heating and gas flow
Facility Requirements
* Compressed air: 60 to 120 psig (clean and dry)
* System Electrical power: 200 to 240VAC, 40 amp, 1 phase, 50/60 Hz
* Wafer Heating power: 200 to 240VAC, 15 amp, 1 phase, 50/60 Hz
* Cooling water: 1.2 gal/min (house water, filtered) for RF generator
* House vacuum: at leastg .8CFM @ 20 inches Hg
* Mainframe air exhaust: 4 inch duct flange, 100 CFM
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