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Products	AutoEtch Lam 490 Manufacturer: LAM Research Model: Lam 490 Serial: 1903 Condition:Used,Working,complete,just Disassembly from a Fab. *Fully automated microprocessor control *High throughput vacuum load locked *Programmable, variable electrode spacing *Endpoint detection *Can be configured for 3" to 6" wafers *Bulk head mount configuration *ENI OEM 6 13.56 MHz *650W RF Generator. 208 V, 3 Phase, 60 Hz
Rapid Thermal Process
AccuThermo AW 410
AccuThermo AW 610
AccuThermo AW 810
AG Heatpulse 210
AG Heatpulse 410
AG Heatpulse 610
Used Plasma Asher
Matrix 105
Matrix 10
Gasonics Aura 1000
Gasonics Aura 3010
Gasonics Aura 2000LL
Branson IPC 3000
Branson IPC L3200
Used Plasma Etcher
Matrix 303
Gasonics AE 2001
AutoEtch Lam 490
Lam Rainbow 4520 Oxide Etch
Lam 4428 for Plasma Etch
Used Electrical Test
PCM Software
HP 4062UX
HP 4145B
EG 1034
EG 2001
EG HORIZON 4085X
Temptronic TP03500
Used Metrology Instruments
Hitachi S8840
Hitachi FE-SEM model S-4160
Hitachi S-4500
Hitachi S-4700
Hitachi S-8820
Hitachi S-9300
Micrion FIB model M9500
LEO FE-SEM model 982
Other Semiconductor Equipment

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