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Refurbished AG Heatpulse 610
Manufacturer:AG Associates
Refurbished by:Allwin21 Corp
AG Associates Heatpulse 610 is a rapid thermal processor which uses
high-intensity, visible radiation to heat single wafer for short periods at
precisely controlled temperatures. These capabilities, combined with the
heating chamber's cold-wall design, superior heating uniformity, provide
significant advantages over conventional furnace processing and conventional
RTP systems.Wafer Size:Up to 6inch.
Manual Operation
Closed-loop temperature control with pyrometer or thermocouple temperature
sensing.
Precise time-temperature profiles tailored to suit specific process
requirements.
High-intensity visible radiation heats wafers for short periods. Fast heating
and cooling rates unobtainable in conventional technologies.
Consistent wafer-to-wafer process cycle repeatability.
Elimination of external contamination.
Small footprint and energy efficiency.
AG 610 RTA RTP is a versatile tool, which is useful for
many applications:
• Ion Implant Activation
• Polysilicon Annealing
• Oxide Reflow
• Silicide Formation
• Contact Alloying
• Oxidation and Nitridation
Typical Application Area:
- Chip Maufacture
- Compound
Industry:GaAs, GaN, GaP, GaInP,InP and SiC
- Optronics:Planar
optical waveguides,LASERs, LEDs and VCSELs
- Biomedical
- MEMS
- Nanotechnology
- Solar Cell
We can also provide our own proprietary AW Control Software and Superior Temperature Control Technology to upgrade the
refurbished AG Heatpulse 210 which provides the following significant
advantages.
- Add timer watch for
the oven safety issue (the original has no safety interlock for the
computer locks up, chamber would be burned if the computer locks up when
process running).
- The new software with
power summary function to detect either lamp failure or sensor failure
Software calibration and easy to be done.
- More functions and I/O
hardware “exposed” for easier maintenance and trouble shooting.
- It is easy to edit
recipe with GUI and graph display.
- Save all process data
on the computer hard disk.
- A/D and D/A precision
is 14 to 16 bits.
- Detect in process and with
color curve displayed on the screen.
- Lamp damage detect in
process.
- Software watch dog to
eliminate machine damage duo to the computer locks up or freeze.
Sensor status detect function.
- On line help function
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