Refurbished GaSonics Aura 2000LL Loadlock Asher
Manufacturer:Gasonics
Gasonics is a Registered Trademark of Novellus Corp. Gasonics Aura 2000LL is a 8" Cassette to Cassette ,Single Wafer Downstream Microwave Asher w/ Loadlock with microwave source and a dictated reactor chamber ,8" Cassette to Cassette ,Single Wafer Asher ,Configured for 4" - 8" wafers,Loadlock with cool-down station for processed wafer Gas box, designed to hold 4 MFC's capability (System includes 2 MFC's calibrated to customer gas specifications Downstream endpoint detection Rear access with control panel for servicing .No RF damage (0.1 VOLT CV SHIFT) Front and backside etching .Variable platen temperature Alumina (ceramic) Plasma Tube Fluorine compatible chamber Multiple step process capability.
